Optoprofiler LLC - Opto-Caliper Probe
This is a compact probe enabling absolute distance
Our Opto-Caliper prob can be integrated with cables of arbitrary
length with significant improvement over Echoprobe and
Michelson Interferometer solutions.
Hight warp and wafer curvature options are available. Solution
can be provided in single, dual probe, and multiprobe version.
Dual probe version can be implemented for nontransparent
wafers and slab metrology.
Optical Thickness and Distance Probe Specifications